Inpria Corporation is a pioneer in extending semiconductor lithography with inorganic photoresists for nanoscale patterning. Inpria’s patented photo-condensed molecular oxides offer customers the unique ability to deposit – directly from solution – atomically smooth, intrinsically dense, and directly photopatternable metal oxide films, enabling advanced performance with simplified processing.

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Taiwan Semiconductor Manufacturing Company

JSR Corp

Inpria

Excited to be officially part of the JSR Group!
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Andrew Grenville

Director Intellectual Property

Alan Telecky

Director of Product Integration

Jason Stowers

Director, Synthesis Scaleup

Joseph Edson

Controller

Danielle Stelmach

Sr. EHS Manager

Evan Church

Environment, Health and Safety Manager

Kate Jensen

Korea Country Manager

Kevin(Sangyoon) Woo

Engineering

Mark Geniza

Senior Staff Chemist

Alexander Marwitz

Samuel Kim

Michael Stewart

James LaCasse

Member of the Board of Directors

Jim Bucholtz

Vice President Quality

Chairman

Douglas Keszler

Founder

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Inpria Corporation is a pioneer in extending semiconductor lithography with inorganic photoresists and other thin-films for nanoscale patterning. Inpria’s patented photo-condensed molecular oxides offer customers the unique ability to deposit – directly from solution – atomically smooth, intrinsically dense, and directly photopatternable metal oxide films, enabling advanced performance with simplified processing.

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Corvallis

Oregon

United States

North America

White House names Oregon as tech hub for semiconductors, mass timber – Oregon Capital Chronicle

Additives for metal oxide photoresists, positive tone development with …

Organometallic photoresist developer compositions and processing methods

Monoalkyl tin compounds with low polyalkyl contamination, their compositions …

Stable solutions of monoalkyl tin alkoxides, and hydrolysis products and …

Gas-based development of organometallic resist in an oxidizing halogen-donating …

Inpria sues Lam Research over EUV materials patents

Inpria Co-Developing Metal Oxide Resist with SK hynix to Reduce Complexity of Patterning for Next-Generation DRAM

Emerging Semiconductor Fabrication Technology Report 2021 Featuring Innovators - Inpria, Epiluvac, Picosun, Nanotech SWHL, & ALLOS Semiconductors

JSR Corp. buys Corvallis-based Inpria for $514M

Inpria's metal oxide photoresists are designed for EUV lithography, enabling patterning at small pitches and feature sizes with improved resolution and reduced photon shot noise.

Inpria provides developer and other ancillary materials as part of a holistic product solution for semiconductor manufacturers using EUV lithography.

Inpria operates an advanced manufacturing plant in Corvallis, Oregon, producing EUV photoresists to meet stringent semiconductor industry standards.

Inpria's quality management systems include advanced process automation and integrated Statistical Process Control to ensure product quality and reliability.

Inpria's global supply chain consists of established tier one semiconductor industry suppliers to ensure the quality and reliability of its products.

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Inpria is a semiconductor materials company that specializes in developing and manufacturing advanced inorganic photoresists for the semiconductor industry. Their photoresists enable the production of smaller, faster, and more efficient semiconductor devices.

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